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Inhalt:

Publikationen

D. Löhe (TU Karlsruhe, Germany), J. H. Haußelt (Forschungszentrum Karlsruhe, Germany) (Hg./Ed.)

Advanced Micro & Nanosystems (AMN)

Volume 3: Microengineering of Metals and Ceramics Part I

3527-31208-0

Contents:

MEMS Technologies and Applications:

M3 - The Third Dimension of Silicon
P. M. Sarro

Trends in MEMS Commercialization
J. W. Knutti, H. V. Allen

Capacitive Interfaces for MEMS
V. P. Petkov, B. E. Boser

Packaging of Advanced Micro and Nanosystems
V. M. Bright, C. R. Stoldt, D. J. Monk, M. Chapman, A. Salian

High-frequency Integrated Microelectromechanical Resonators and Filters
F. Ayazi

MEMS in Mass Storage Systems
T. R. Albrecht, J. U. Bu, M. Despont, E. Eleftheriou, T. Hirano

Scanning Micro- and Nanoprobes for Electrochemical Imaging
C. Kranz, A. Kueng, B. Mizaikoff

Nanodevice Technologies and Applications:

Nanofluidic Simulations
M. Geier, A. Greiner, D. Kauzlaric, J. G. Korvink

Nanofluidics - Structures and Devices
J. Lichtenberg, H. Baltes

Carbon Nanotubes and Sensors
J. R. Stetter, G. J. Maclay

CMOS-based DNA Sensor Arrays
R. Thewes, F. Hofmann, A. Frey, M. Schienle, C. Paulus, P. Schindler-Bauer, B. Holzapfl, R. Brederlow

Weitere Informationen

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